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CLEAN SYSTEMS KOREA INC.
http://eblog.gobizkorea.com/cskorea97
Updated 2008.06.19
   
    Product
SCRUBBER :
DRY SCRUBBER(CS195SC)
DRY CLEANSORB technology focuses on quantitative removal of hazardous and toxic gases from semiconductor processes through high capacity absorbents and chemical reactions under high temperatures. A variety of absorbents have been designed according......
[2008.06.19]


WET SCRUBBER(CW600)
The Wet Scrubber is a control system that safely treats a process gases. This system provides touch screen for all functional control to minimize the human error by the message prompts and interlock features in all process during operation.
[2008.06.19]


THERMAL & WET SCRUBBER(CTW600)
T&W Scrubber is applied to the CVD process to handle gases such as SiH4, PH3, AsH3, B2H6, NH3, WF6 and the diffusion process. Toxic gas is dissolved and oxidized under high temperatures above respective burning points to bring gases below TLV level......
[2008.06.19]


BURN & WET SCRUBBER(CBWT)
Burning Source : CH4, O2 Dual Type Back Up System 208~220VAC, Single, Max. 30A
[2008.06.19]