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CSK Inc.
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Updated 2017.02.02
   
    Product
SCRUBBER :
WET SCRUBBER(CW600)
The Wet Scrubber is a control system that safely treats a process gases. This system provides touch screen for all functional control to minimize the human error by the message prompts and interlock features in all process during operation.
[2008.06.19]


THERMAL & WET SCRUBBER(CTW600)
T&W Scrubber is applied to the CVD process to handle gases such as SiH4, PH3, AsH3, B2H6, NH3, WF6 and the diffusion process. Toxic gas is dissolved and oxidized under high temperatures above respective burning points to bring gases below TLV level......
[2008.06.19]


BURN & WET SCRUBBER(CBWT)
Burning Source : CH4, O2 Dual Type Back Up System 208~220VAC, Single, Max. 30A
[2008.06.19]