An UN9500A-W product, equipment designed to treat toxic gases created in the process of semiconductors below TLV value, is already cclaimed by customers. Its main features are characterized by high treatment efficiency, minimum DOWN-TIME and PM, handy MAINTENANCE, excellent safety and CONTROL SYSTEM, and RECIRCULATION.
Principle: Wet Type
Features : High gas treatment efficiency
Excellent safety system
Recirculation System
Low running cost
Handy operation and maintenance
Compact Design
PLC Control
Maximum gas treatment capacity (N₂and Air included) : 400LPM
Treatable gases : Water-soluble gases (Cl₂, F₂, HCl, HF, NH₃, ...............................etc)