RF GENERATOR & MATCHING NETWORK UNIT , YSR-50MC & AMN-150A-FA

ITEM SPECIFICS

Brand

YOUNGSIN-RF

Model YSR-50MC & AMN-150A-FA
origin

Republic of Korea
Size(Capacity)

Standard

Quick Details

Place of Origin: Seoul, South Korea
Brand Name: YOUNGSIN-RF
Model Number: YSR-50MC & AMN-150A-FA
Input Voltage: 220V
Output Power: 5000W
Output Frequency: 13.56MHZ
Product type: RF GENERATOR & MATCHING NETWORK UNIT
Control mode: Digital Matching control
Cooling method: Water Cooling
Application1: Semiconductor manufacturing,Flat Panel Display manufacturing
Application2: Solar panel display, surface treatment

Packaging & Delivery

Delivery Time	Shipped in 10 days after payment

YSR RF Generator 5KW Package

This package includes:

RF Power Generator - YSR-50MC
Auto Matching Network Unit - AMN-150A-FA
Auto matching control software(If requested)

*it’s possible to select one to purchase

Description

YSR-50MC

YSR-50MC is the 5KW RF Generator YOUNGSIN-RF developed. Due to modular design, it’s possible to reduce lead time. Using high quality and qualified parts, long product life is guaranteed and chance of malfunction is minimalized. Multi protection functions is added for reliability of the product. That’s why this product can be utilized in various and specific applications, such as CVD(PE-CVD, ICP-CVD), PEALD, Etcher(RIE, ICP-RIE), Asher, RF Sputter, Atmospheric Pressure Plasma and so on.

AMN-150A-FA

AMN-150A-FA is the Matching Network Unit which is rated at 5KW max. Due to modular design, it’s possible to reduce lead time. Using high quality and qualified parts, long product life is guaranteed and chance of malfunction is minimalized.

About matching control, because of Preset Matching position, Auto Matching control within 2 seconds can be fully operational. In addition, Full digital Matching Software can enable users to adjust Matching position value more precisely.

Benefits & Features

YSR-50MC

Modular Design to reduce lead time.
User-friendly Operation mode including Step 1,2,3 mode.
VFD screen to check RF power status in real time.
Various applications- CVD(PE-CVD, ICP-CVD), PEALD, Etcher(RIE, ICP-RIE), Asher, RF Sputter, Atmospheric Pressure Plasma.
Use of AMP module for stable and high RF power delivery.
Multi protection functions- Sensor detection against over RF power, over voltage, over heat and the rest.

AMN-150A-FA

Possible to select Full Digital Matching method.
Matching Speed: Auto Matching within 2 seconds.
Use of Stepping Motor for upgrading accuracy and speed.
Possible to adjust matching control positions on self-developed Full Digital Matching Software.