The nano positioning scanner driven by PZT or VCM can move samples with a high speed and accuracy as well as large working range. It is suitable to scan with nano lovel accuracy for various applications such as SPMs.
ㆍOptimized liaf spring structure
ㆍVivration reduction control
ㆍVariable size and multi-DOF of the scanner
ㆍBuilt-in high resolution capacitve sensor(resolution:0.1nm)
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#409 Mechatronics Dept.Gwangju Institute of Sciences & Technology(GIST) 1, Oryong-dong, Buk-gu GWANGJU, Korea, 광주광역시,
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