Compact design &small foot-print
Low chemical & DIW consumption
Touch panel operation with PLC control
Mode : Auto mode, Manual mode
Easy input & edit of process parameters
Real-time display of system condition
Multy-interlocks for Human safety
Quartzware size : Up to for 300mm quartzwares
Quartzware type : Inner/Outer tube, Boat, Pedestal,..
Application chemical :HF, HNO3,...
2PVDF cleaning chambers
2Chemical mixing tank with recirculation function
Nozzle : Top, Bottom, Side, Flexible,...
Rotary top-side jet nozzles
Transparency door with DIW cleaning & N2 purge
Ph meter installation
N2 heater for quartz and chamber drying
T/C cleaning function with end-cap