Catalyst type PFC Scrubber is the gas treatment device which uses catalyst based method to decompose and remove PFC gas from the semiconductor production process. CF4, SF6, NF3, C2F4are the most noticeable PFC gases. Though those gases are relatively stable and are not toxic, But, Our scrubber is and thousands times as high as carbon monoxide.
A considerably high temperature exceeding 1,300℃ used to be required to decompose those gases, but the scrubber which uses the catalyst inducing a low temperature oxidation decomposition is the equipment capable of removing almost over 99% of PFC gases at the relatively range around 750℃.
(SEMI S2 인증획득)