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Unbranded

UHV Sputter System for Pt Deposition with 3x8

  • Payment
    T/T
  • MOQ
    Negotiable
  • Country of sale
    World Wide
  • PRICE
    • FOB

      Depend on quantity

ITEM SPECIFICS

  • Brand
    Unbranded
    Model UHV Sputter-80P
  • origin
    Republic of Korea
  • Size(Capacity)

Metalization in various thin film sensors other multilayer and codeposition applications.

Special Features

UHV sputter system for R&D and small scale production(base pressure: 5 X 10-8 Torr within several hours).
Automatical process control.
Substrate holder with rotational and revolutionary motions.
Substrate heating up to 500'C.

Specifications

Wafer capacity : 6 x 4"
Average throughput Up to 11,000 wafers per year
Dimension : 1300L X 1200H X 1400W (mm3)
Power : AC 2.8 kW (13.56MHz) for bias
DC 3kW for Pt sputtering
Gas : Ar / O2 /N2
Pump : rotary(980l/min) & turbo(1,500l/s)

PAYMENTS DETAILS

This supplier supports payments for offline orders
  • Telegraphic Transfer : T/T
Contact Payment Manager
  • Name : Cho Young Sang
  • Tel : 82-0325088060
  • Email : atech@atechsystem.co.kr

SHIPPING

Shipping from : Republic of Korea
  • 18 Annam-ro 369beon-gil, Bupyeong-gu, Incheon (21312)
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A-Tech System
  • The person in charge

    Young Sang Cho
  • Telephone

    82-0325088060
  • Fax

    -32
  • Address

    18 Annam-ro 369beon-gil, Bupyeong-gu, Incheon (21312)
Introduction
Since A-Tech System was founded in 1995, we have succeeded in the commercialization of PVD, CVD and etching systems starting with Ion beam source and Vacuum Arc source. We have invested huge resources for R&D with our highly skilled engineers and Ph.D level researchers. We can promise we will solidify as a major company providing guaranteed equipment for the successful mass-production by putting our best efforts based on the customer's requirements.
  • Business Type :
    Manufacturer
  • Main Product :
  • Established :
    1995
  • Total Annual Revenue :
  • Total Employees :
    11~50 people

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