Viatrons APCVD system offers uniform high quality films of ceramics, semiconductors, or metals on large glasses at low cost and high production level.
Viatron offers two types of APCVD systems. HTCVD system is a high temperature in-line type APCVD with high throughputs. LTCVD system is a cluster-type low temperature APCVD which can produce multilayer films. The flexible configration aspect of the system allows us to design the systems for customers specific processes and applications.
We offer complete processing package, including precursor sources and process formulas specifically optimized for customers applications in semiconductor, display, and solar cell fabrications.