As one of the most important part in Probe_Station, manipulator is an accurate system that can probe micro distance(㎛) and contact on the electrode of semiconductor wafer, device. ECOPIA’s Manipulator is very easy to use and probe arm’s elastic plate function as protecting sample’s surface, from damage during Z axis movement.
Only difference from EMP-7 is that EMP-9 has micrometer in the X, Y, Z motion knob
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