ITEM SPECIFICS
-
Brand
-
origin
-
Size(Capacity)
PRODUCT DESCRIPTION
Sample : Polygon mirror
Throughput : 500 Polygon mirror/1hr (in case, polygon mirror thickness is 2mm)
E-Beam power : 6kW (10kV)
E-Beam source : 25cc × 4pocket
Film thickness control : Automatic control
Sample holder rotation
Ultimate pressure : ≤ 5 × 10-7Torr
Vacuum pump : Cryo pump + Rotary pump
Process control : Auto process control
Dimension
Main system : 2300mm(W) × 1750mm(D) × 2100mm(H)
Control rack : 620mm(W) × 700mm(D) × 1800mm(H)