It is an industrial plasma coating system for hydrogen-free DLC coatings(ta-C). The FCVA system is one of hybrid PVD system, and utilizes arc ion plating technology for coating. The DLC film deposited by the system features ultra high hardness. By filtering macro particles, it also features smooth coating surface.
* Specifications
Process Chamber Size |
Custom-made |
Plasma Source |
Filtered Cathodic Vacuum Arc Unbalanced Magnetron Sputter |
Substrate Turntable |
4 axes ~ Single, Double, Triple Rotation |
Precursor Gas |
Mass Flow Control System Ar, N2, O2, C2H2, CH4, C6H6, etc. |
Base Pressure |
~10-6 torr |
Pumping System |
Turbo Molecular Pump(high vacuum) Booster Pump Rotary Pump |
Bias Power |
DC Pulse |
Heater |
Max. 300℃ |
Control System |
Fully automatic under the MS Windows environment |
The person in charge
Telephone
82-0314991005Fax
031-499-1006Address
403-9, Mongnae-dong, Danwon-gu, Ansan-si, Gyeonggi-do, Korea, 경기도,0 / 4000
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