DRA 100 (VCR Type) is the Pressure Reducing Regulator designed for ultra-pure semiconductor manufacturing special line, bulk gas line, and other equipment lines. To use for semiconductor hook-up line, its internal surface is treated at B.A. 17~20 Ra level up to E.P. 10 Ra or 5 Ra level.
We have applied patented our product which has the following strong points:
First, it distributes the pressure on diaphragm evenly.
Second, it keeps the cleanness and purity of semiconductor manufacturing line by removing the threads and prevents the occurrence of particles.
Third, it minimize the accumulation of fatigue on diaphragm to prevent gas leakage. All processes from welding to assembly, test, and cleaning will be performed in a clean room of 100-class and 10-class.
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