UHV Sputter System with 8x3

Payment

T/T
MOQ

Negotiable
Country of sale

World Wide
Catalogue
PRICE
- FOB
  
  Depend on quantity

Description
Shipping&Payments
Company Introduction
POC SUGGESTIONS
(PROOF OF CONCEPT)
Product Reviews

ITEM SPECIFICS

Brand

Unbranded

Model UHV Sputter-100M
origin

Republic of Korea
Size(Capacity)

PRODUCT DESCRIPTION

Ferromagnetic materials deposition for MRAM and hard disk products

Special Features

Ultrahigh vacuum sputter system for R&D and small scale production.
(base pressure: up to ~ 10-9 Torr obtained with only mechanical & turbo molecular pumps)
Ferromagnetic metals preheated and predeposited in load-lock chamber.
Substrate rotation system to be automatically positioned.

Specifications

Power : DC 500W 2ea, DC 1500W 1ea
Gas : Ar
Pump : rotary(970l/min for process chamber & 600l/min for loadlock chamber) & turbo(1,380l/s)
Heater : halogen lamp in loadlock chamber(max. 700'C)

PAYMENTS DETAILS

This supplier supports payments for offline orders

Telegraphic Transfer : T/T

Contact Payment Manager

Name : Cho Young Sang

SHIPPING

Shipping from : Republic of Korea

18 Annam-ro 369beon-gil, Bupyeong-gu, Incheon (21312)

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A-Tech System

www.atechsystem.co.kr

The person in charge
Young Sang Cho
Address
18 Annam-ro 369beon-gil, Bupyeong-gu, Incheon (21312)

Introduction

Since A-Tech System was founded in 1995, we have succeeded in the commercialization of PVD, CVD and etching systems starting with Ion beam source and Vacuum Arc source. We have invested huge resources for R&D with our highly skilled engineers and Ph.D level researchers. We can promise we will solidify as a major company providing guaranteed equipment for the successful mass-production by putting our best efforts based on the customer's requirements.

Business Type :

Manufacturer
Main Product :
Established :

1995-01-01
Total Annual Revenue :
Total Employees :

11~50 people