Hard materials coating(eg. CrN, TiN, TiAlN)
Anti-corrosive coating(eg. ZrN)

Special Features

Vacuum arc system for mass production(base pressure: 1 X 10-6 Torr).
Pumping system equiped with mechanical booster and oil diffusion pumps.
Automatically or manually controlled in substrate revolution and rotation.
Batch type of substrate loading.
Average throughput Up to 3,000,000 pcs per year.

Specifications

Dimension : 1,200L X 1,100H X 2,400W (mm3)
Power : DC 200A/100V 11ea for arc
DC 35A/1000V 1ea for heater
DC 10A/1000V 1ea for bias
Heater : sheath heater(heating rate: 30°C/min, max. temp.: 600°C, temp. deviation : negligible)
Gas : Ar / N2 / H2 / CH4 / C2H2
Pump : rotary(5,800l/min) & booster(50,000l/min) & diffusion(12")