DaON is a Thermal and E-beam evaporation system, and DaON is Modular design configured to
suit a variety of thin film deposition application for R&D.
DaON is equipped with four pocket E-beam sources and two thermal sources to handle a
diverse range of materials including superconductors, dielectric substances, semiconductors,
metals, and insulators.
1. Self-made e-beam source
2. Full auto process by PC
3. Process recipe function
4. Evaporation of almost every material is possible at high deposition rate while remaining free
5. Precise control
6. Excellent, economical, and high thermal efficiency
7. Low vapor pressure material evaporation is possible, easy operation, and multi purpose
Magnetic disk drives, disk read heads, metal film
Capacitor and resistor, IC metals, Insulators,
Gate barriers, consumer micro-processors
Electronics, optical data storage disks
1. Substrate Size: 4 inch
2. E-Beam Source: 6cc/4 pocket
3. Thermal Source: W boat/2 ea.
4. Pressure: 5.0 x 10-6 torr
* DaON 1000T : Thermal Source
* DaON 1000E : E-beam source
* DaON 1000TE : Thermal & E-beam Source
* DaON series
- Korea Institute of Industrial Technology
- I company in Korea
- Korea Advanced Institute of Science Technology and more.
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