In the process of semiconductor sawing M/C, sawing and holding process needs suction and exhaust of impurities & Di-Water. At this time, the recovery system is needed. VRS is the necessary system to enable the process to be smooth by covering the weakness of water ring vacuum pump. This new concept system is the registered inventive patent technology which combines Omega Automation's vacuum trap and Sweden PIAB's multi-stage vacuum ejector.
Semiconductor, LCD, PDP suction cleaning device. Vacuum recovery device application. No use of motor. Noise level under 60dB(A). No use of other facility. Life time is long. Very low maintenance fees. During suction of Di-Water, at the same time separate and remove even stay vacuum status.
Product Specification / Models
VRS Series (VOT-600, 700, 750.etc.) Optional : Main Vacuum Source [Ejector, Pump] & Customized of manufacture. Open Vacuum Flow : 1,008~5,040 N-/min. Max. Vacuum : -95 kPa.
Semiconductor sawing equipment. Vacuum packaging M/C for food. LCD, PDP suction cleaning (holing) M/C. Diesel oil vacuum recovery equipment. Etc. Class grinding & cleaning device
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