Field Emission SEM (Model SEMIRON: 5000)
FEATURE
Compact Dimension
Powerful Image Resolving Power
Easy Operation & Maintenance
Auto Stepping & Auto Tiling with Precision Stage
Powerful Image Analyzer
Various Applications TSEM, STEM-In-SEM
Resolution ~1.0nm
Magnification 10X~1,000,000X
Accel. Voltage 0.1~30KV (Continous)
Stage X/Y/Z=60/70/65mm
Tilt -20°~60° Rotation 360°
Chamber 240X260X302 (H)mm
Vacuum R.P + TMP+I.P
GUI Multi Window with Image Analzyer Package
OPTION EDS, BSE, WDS, EBSD, CL, Cooling Stage, IR CCD etc.
FE SEM is available in Korea market and available in overseas market from 2016