1. Resolution
|
3.0nm @ 30KeV
|
2. Magnification
|
10X~1,000,000X
|
3. Auto-Function
|
Auto-Focus/ Auto-Stigmator
Auto-Contrast/Brightness/ Auto-Gun Alignment/ etc. |
4 Stage
|
5 axis stage
Auto Stepping & Auto Tiling
|
5 Stage Stroke
|
Motorized X,/Y,/R
60/70/65mm(X/Y/Z), -20o ~60o Tilt/ 360o Endless |
7. Chamber Volume
|
242 X 260 X 302mm(L/W/H)
|
8. Vacuum System | Rotary Pump + TMP(300 liter/sec) |
9. Options
|
EDS, BSE, WDS, IR CCD, Etc.
|
10 Software |
Image Analyzer Package Included
Multi-Focus/Tiling/Particle Counter etc
|
11. REMARK
|
TSEM, STEM-in-SEM, Heat SEM etc
|
The person in charge
Telephone
82-0313491411Fax
0707-507-1411Address
#505 World-Vision Bldg. 234-6, GoCheon-dong, Uiwang-si, Gyeonggi-do, Korea, 경기도,Please enter the text on the left image to prevent automatic input.
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