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Thermvac

CVD Reactor Furnace

  • Payment
    L/C(sight) , T/T
  • MOQ
    Negotiable
  • Country of sale
    Asia
  • PRICE
    • CFR

      Depend on quantity

ITEM SPECIFICS

  • Brand
    Thermvac
    Model TVUHT-PUR******
  • origin
    Republic of Korea
  • Size(Capacity)
    254~3532L Load Volume
 
 
▶ Equipment Profile : Vertical High Temperature Ceramic CVD Reactor Furnace
▶ Application : CVD or CVI Coating of Ceramics Thin Film
▶ Operation Temperature : Nor. 1,000~2,200℃ [Max. 2,400℃] 
▶ Load Volume : 254 ~ 3532L
▶ Temperature Uniformity : ±6~12℃  
▶ Heat-Up Rate : 10℃/min(~1500℃), 5℃/min(~2000℃), 2℃/min(~2200℃) 
▶ Temperature Measurement : Pyrometer and/or Thermocouple 
▶ Hot Zone Materials : Graphite 
▶ Reactor Box : Polygonal Cylinder type Retort of Graphite CIP
▶ Precursor Gas : MTS, CH4, TaCl4, HfCl4, BCl3-NH3                                                      
▶ Other Process Gas : H2, N2, Argon                                              
▶ Process Pressure : 5 ~ 50 KPa 
▶ Evacuation : MBP + Dry Pump                                                                                
▶ Sample Loading : Bottom Loading Elevator and Turn Table
▶ Leak Rate : Better than 1×10-(3)Pa・㎥/sec 
▶ Forced Cooling : 2200℃ -> 200℃ during 18~36 hours approx.                                    
▶ Exhaust Treatment : Condensing Trap, Particle Fileter and Scrubber
▶ System Control : PLC Control and PC & Touch Panel Interface                                                          
▶ Heaing Power : AC 3Φ or DC Power    
 
 
 

PAYMENTS DETAILS

This supplier supports payments for offline orders
  • Letter of Credit : L/C(sight)
  • Telegraphic Transfer : T/T
Contact Payment Manager
  • Name : In seok Choi
  • Tel : 82-0313514490
  • Email : crm1@thermvac.co.kr

SHIPPING

Shipping from : Republic of Korea
  • 480-126 Jangan-ro Jangan-myeon, Hwaseong-si, Gyeonggi-do (18583)
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Thermvac Inc
  • The person in charge

    INSEOK CHOI
  • Telephone

    82-0313514490
  • Fax

    -354
  • Address

    480-126 Jangan-ro Jangan-myeon, Hwaseong-si, Gyeonggi-do (18583)
Introduction
We, Thermvac Inc. are the frontier who has raised vacuum furnace industry to a higher level in Korea, having started from early copy manufacturing stage and now getting into take-off stage developing new furnace types based on our own design and engineering capability. Responding to requirements from emerging new materials business, we have kept developing various vacuum furnaces for new materials and now have full line-up of sintering, dewax & sintering, pressure, ultra high temperature, CVD coating and crystal growing. 2014 year, Korean government designated Thermvac as a developer of national infra equipment for heat treatment process, 20 Bar gas quenching heavy duty vacuum furnace. When completing this development project in two years, Thermvac expect having global competitiveness of overall vacuum furnaces, not only for new materials but also for conventional heat treatment.
  • Business Type :
    Manufacturer
  • Main Product :
    VACUUM FURNACE
  • Established :
    1993-09-06
  • Total Annual Revenue :
    4~5 billion (KRW)
  • Total Employees :
    11~50 people

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