Film | Thickness | Spec.(%) | * | Notes | |
Nitride | Thin | 50 ~ 500 Å | ≤ 3.0 | D | |
Thick | 500 ~ 5,000 Å | ≤ 3.0 | |||
Si | Amorphous | 500 ~ 10,000 Å | ≤ 3.0 | D | on Oxide |
Poly | 500 ~ 3,000 Å | ≤ 3.0 | |||
P-TEOS | 500 ~ 40,000 Å | ≤ 3.0 | S | ||
P-SiON, P-SiN, P-SiO2 | 300 ~ 3,000 Å | ≤ 3.0 | S | ||
Oxidation | 30 ~ 20,000 Å | ≤ 3.0 | D | ||
Tungsten (W) | 100 ~ 10,000 Å | ≤ 3.0 | S | on TiN/Oxide | |
LPCVD Oxide | 50 ~ 500 Å | ≤ 3.0 | S | ||
ACL (Amorphous Carbon Layer) | 1,000 ~ 20,000 Å | ≤ 3.0 | S | ||
PR (I-Line/KrF/ArF) | 10,000 ~ 30,000 Å | ≤ 3.0 | S | ||
SOH (Spin on Hardmask) | ~ 2,700 Å | ≤ 3.0 | S | H-SOH | |
P.I. (Polyimide) | 60,000 ~ 100,000 Å | ≤ 3.0 | S | ||
PBO (Poly Benzoxazole) | 60,000 ~ 90,000 Å | ≤ 5.0 | S |
- Minimum Order Quantity : 25 pcs - Delivery : within 4 weeks * D : Double Side Deposition, S : Single Side Deposition |
The person in charge
YONG WEON KIMAddress
2066 Seobu-ro Jangan-gu, Suwon-si, Gyeonggi-do (16419)Please enter the text on the left image to prevent automatic input.
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