Semiconductor Porous Chuck
Product Name |
Semiconductor Porous Chuck (HBC) |
Brand Name |
HANBAEK |
Weight |
Approx : Custom precise machining according to the provided drawing |
Height |
Custom precise machining according to the provided drawing |
Width |
Custom precise machining according to the provided drawing |
Origin |
Republic of Korea |
Key Features
1. Maintaining strict tolerances, requiring advanced machining capabilities to achieve minimal deviation from specified dimensions.
2. Achieving optimized cost by strategically integrating our production infrastructure and developing partnerships with domestic and foreign specialized manufacturers for materials, components and equipment.
3. Excellent quality and competitive production are achieved with a systematic quality control and inspection system.
4. Hold ISO9001, ISO14001 and ISO45001 certifications, encompassing the development and manufacturing of a comprehensive range of semiconductor equipment parts. Additionally, we have established an MES with SPC to monitor and analyze process variations in real time, improving quality and reducing defects. We also utilize GR&R analysis to enhance product quality and customer satisfaction.
5. For ESG management, we have obtained ISO 37001 certification, installing solar power generation facilities at our factory, and managing carbon emissions of our major products, such as the oxygen-free copper wafer vacuum chuck, based on an LCA-based carbon report.
6. Acquired SSQ certification as a partner of SEMES (Top 10 global equipment maker), one of the world's best semiconductor equipment companies.
7. Supplying semiconductor precision parts to the top-tier semiconductor equipment manufacturers in the United States, the world's largest semiconductor market.
Advantage
1. Manufactured in own factory
2. Honest price through direct production/distribution
3. In-house R&D Center for quality improvement, development support and active participating in corporate and national research support projects aimed at localizing parts
Warranty
1. The warranty covers the defective product identified during the inspection stage prior to use.
2. Prompt replacements will be offered for the defective product mentioned in 1 item.
Product Description
• Semiconductor Porous Chuck (HBCP)
Semiconductor porous chucks are essential in processes like lithography, etching, chemical vapor deposition (CVD), and other semiconductor manufacturing stages. They ensure the wafer is held safely and effectively, enabling precise manufacturing.
• Porous Structure
The fine holes on the chuck’s surface allow vacuum or compressed gas to hold the wafer securely.
• Uniform Support
Provides consistent support across the entire wafer, minimizing deformation or damage.
• Precision Process Suitability
Ideal for high-precision processes involving fine structures or x-layers.
• Temperature Control
Some chucks include temperature regulation to maintain wafer temperature during processes.
• Cleanliness Maintenance
The porous structure helps remove contaminants between the chuck and the wafer, reducing the risk of contamination.
Specification
Class |
Category |
Standard |
Remark |
Product |
Adsorption
Surface |
Flatness
(150mm*150mm) |
Max. 5μm |
It can be changed depending on the SIZE
※ Based on Aluminum |
Flatness
(300mm*300mm) |
Max. 5μm |
Flatness
(500mm*500mm) |
Max. 5μm |
VAC Pressure |
-90kpa |
Vacuum (Normal 159 NI/m) |
CDA Pressure |
0.4MPa |
Floating |
Physical
Property |
Material |
Si02 . Al203 . METAPOR® Porous etc. |
|
Color |
Black(B), White(W) |
|
Pore Size |
19~25 µm |
|
Porosity |
21~40 % |
|
Hardness (HS) |
80~90 |
|
Density(g/㎤ ) |
1.8~3.3 |
|
ESD(Ω㎠) |
10^6~10^9 |
|
Slze |
Custom sizes available upon request |
|
|
|
|
Body Base |
Material |
Aluminum, Ceramic |
SUS Available |
Surface treatment |
Anodizing or Bare |
|
Company Overview
"The Difference in Fineness is Innovation"
We are a leading company specializing in the manufacturing of high-quality semiconductor wafer vacuum chucks, flow meters, and other precision components. Our close collaboration with global customers in the Republic of Korea ensures the rapid and cooperative development of R&D products. The majority of the products we manufacture for our customers require stringent tolerances that must be met. HANBAEK aims to achieve high-speed production, superior quality, competitive costs, and optimized performance through our integrated infrastructure of production, quality control, and inspection systems. We also maintain strategic partnerships with domestic and foreign manufacturers specialized in materials, parts, and equipment.
We are capable of manufacturing and supplying custom-made precision parts for various mechanical equipment, including semiconductor production equipment, displays, aerospace, batteries (secondary cells for electric vehicles), robots, and solar power equipment.
As the preferred and trusted partner of global industry leaders, we have established a reputation for exceptional capabilities, a proven track record, and an unwavering commitment to delivering high-quality solutions. Our successful exports of precision parts worth $2 million to the United States further solidify our standing in the industry. We are confident that by working together, we can achieve mutual benefits and explore new business opportunities.
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